Vacuum Systems

 - Nanoquest Line of Ion Beam Etch Systems

• Nanoquest I R&D
• Nanoquest I Load Lock
• Nanoquest II Load Lock
• Nanoquest III

 - Nanochrome Line of Thin Film Coaters

• Nanochrome I - Ebeam Evaporator
• Nanochrome I - Magnetron Sputtering
• Nanochrome II
• Nanochrome II - Load Lock

 - System Subassemblies

• Substrate Stage Brochure
• Platen Assembly Drawing

Ion Sources & Vacuum Accessories

• Water Cooled Anode Upgrade Information
• Mark I Ion Beam Source Flyer
• Mark II Ion Beam Source Flyer
• Thermal Management Products
• KRI Charge and Momentum Exchange
• KRI Ion Beam Neutralizer
• KRI Broad Beam Industrial Sources
• KRI Ion Beam Sputter Deposition

 - Thermal Management

• Mung I MSDS
• Mung II MSDS
• Drichuk Data Sheet

Vacuum Process Reference

• Ion Etch Rates Table
• Ion Etch Rates Chart
• Target Library