Replacement Ion Source Power Supply

Replacement Ion Source Power Supply

This is a modern retrofit package for Veeco‘s SCR-type MARK II end-Hall ion source power supply. The package comprises the new modular Kaufman & Robinson power supply system including a filament, discharge and gas controller with an integrated MARK II compatible interface.

Both filament and discharge controller feature advanced primary switched power modules with fast arc handling for stable operation over the complete operating range. The controllers can power both the traditional MARK II ion source or the next generation eH series of KRI products.

Features

» MARK II power supply pin compatible interface	» Plug & play installation with remote control compatibility
» Modular architecture	» Optimize upgrade for process application and cost
» Instant arc recovery with constant current mode operation	» Instant arc and short recovery without plasma oscillation
» Repeatable and stable ion beam parameter control over complete operating range	» Increases ion source parameters to optimize process results
» Additional RS232 interfaces	» Comprehensive control via modern PLC
» CE compliance	» Meets EMI and safety standards

Specifications

Gas Controller with iMII Control Interface
Gas Flow	1-20/50/100/200 sccm
Interfaces	- 25 pin MARK II compatible, optoisolated interface - 2x25 pin interfaces to KRI modules - 25 pin analog; 15 pin MFC channel (Brooks 5850E compatible) - RS232 (optional) - System interlock
Dimensions	19", 1U; 4kg
Filament Controller
Power max.	900 W
Max. Output	primary switched 36VAC low frequency; 25A
Interfaces	- 25 pin A/D - RS232
Dimensions	19", 1U; 5kg
Discharge Controller
Power max.	1 kW (EH400)	3 kW (EH1000)
Max. Output	3,5A / 300 V 7A / 150 V (LEHO version)	10A / 300 V
Interfaces	- 25 pin A/D - RS232 (optional)	- 25 pin A/D - RS232 (optional)
Dimensions	19”, 1U; 8 kg	19”, 2U; 18 kg