Ion Beam Source Parts & System Accessories
With over a decade of experience, you can trust Intlvac to supply you with spare parts and accessories for a number of gridded and end-hall ion sources.
Also, as a major manufacturer of high vacuum systems, we carry our own water-feedthroughs, baseplate adaptors, Ion Gauges, Convectron Gauges, CTI Cryopumps and Compressors, thermal management products compatible with high vacuum operation.
Our parts are cleaned for high vacuum use straight out of the bag and our large inventory of parts allows us to ship the same day around the world.
For further information, please view our Literature Library.
For assembly drawings of the Mark I and Mark II ion sources and the HCES, please download the PDFs below: