Nanochrome™ II Automatic Load Lock

Intlvac’s PVD systems are available with an automated load-locked substrate transfer option.  Ideal for runs that are short, the load-lock allows the main chamber to remain at high vacuum, while substrates are removed or loaded. The classic Intlvac “clam shell” design accommodates either a single substrate platen or up to a 5 platen assembly.

Our single platen assembly is ideal for high uniformity runs, with optional optical monitoring directly through the parts being coated. Used with either sputter sources or a large electron beam gun, the system can stay under high vacuum for weeks.

The multi-platen design allows you to still use a double axis planetary with the benefits of a system that is rarely vented to atmosphere.

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