Intlvac's Nanoquest line of systems are used for Ion Beam Etch and Deposition. Systems range from R&D small batch to large production tools. All systems are available with manual or automatic substrate load-locks.
We can also provide etching services to users that would like to evaulate the Ion Beam Milling process. Intlvac has a Nanoquest III system in our development lab fitted with Secondary Ion Mass Spectrometery for End Point Detction. Call Miguel Pereira at Intlvac to arrange a booking.
For further information, please view our Literature Library.
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