Nanoquest Ion Beam Systems

Intlvac's Nanoquest line of systems are used for Ion Beam Etch and Deposition. Systems range from R&D small batch to large production tools. All systems are available with manual or automatic substrate load-locks.

We can also provide etching services to users that would like to evaulate the Ion Beam Milling process.  Intlvac has a Nanoquest III system in our development lab fitted with Secondary Ion Mass Spectrometery for End Point Detction.  Call Miguel Pereira at Intlvac to arrange a booking.

For further information, please view our Literature Library.

Links to customer sites:

http://snc.stanford.edu/equipment/ionmill.html#c2

http://www.mff.ua.edu/Instrumentation/ionmill.html

http://people.ccmr.cornell.edu/~buhrman/Buhrmanfacilities.html