Literature Library
Ion Beam System Parts & Accesories Ion Sources & Vacuum Accessories
- Gridless End-hall Ion Sources and Power Supplies [PDF 689 KB]
- Water Cooled Anode Upgrade Information [PDF: 2.4 Mb]
Thermal Management
- Mung I MSDS [PDF: 403 Kb]
- Mung II MSDS [PDF: 504 Kb]
- Drichuk Data Sheet [PDF: 176 Kb]
Nanoquest Line of Ion Beam Etch Systems
- Nanoquest I R&D [PDF: 2.6 Mb]
- Nanoquest I Load Lock [PDF: 3.5 Mb]
- Nanoquest II Load Lock [PDF: 3.3 Mb]
- Nanoquest III [PDF: 3.4 Mb]
Nanochrome Line of Thin Film Coaters
- Nanochrome I - Ebeam Evaporator [PDF: 3.5 Mb]
- Nanochrome I - Magnetron Sputtering [PDF: 3.1 Mb]
- Nanochrome II [PDF: 4.5 Mb]
- Nanochrome II - Load Lock [PDF: 3.5 Mb]
