|
Thin Film Coating & Etching
Intlvac has a variety of in-house systems to allow us to develop your coating process before you purchase your system from us. We have systems in house for Ion Assisted eBeam, Thermal Evaporation, and Magnetron Sputtering with D.C. and A.C. Sputter modes. Ion Beam Sputter Deposition with an extensive sputter target library at your service. Ion Beam Etch may also be performed using our 20cm ion source and double axes water-cooled planetary substrate stage. |
