Reconditioned Millenion IDM 1200
Modular Ion Beam Optical Deposition System

The IDM-1200 Ion Beam Deposition Module Cluster Tool with its cost effective single load-lock chamber is ideal for R&D and pilot production of dielectric and/or optical thin films. The modular design utilizing industry standards proves to be a versatile, adaptable and cost-effective tool guaranteed to meet your process needs.

The IDM-1200 features CVC's industry proven mechanical substrate stage, dual 12cm inductively coupled RF ion sources, and full system automation control. A MESC compatible robotic substrate handler provides sample insertion on to the substrate stage while maintaining chamber vacuum integrity. A tri-paddle target configuration allows for fast target placement of up to six separate targets. The in-situ optical monitor permits continuous real time measurement of optical properties and thin-film thickness. The completely automated computer control system features total system management in an easy to use windows-based package.

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