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Nanochrome™ PVD Systems
Nanochrome™ R&D
Intlvac’s Nanochrome™ R&D system is an R&D/Pilot Electron Beam Evaporator.
A variety of configurations are possible, all tailored to your specific needs. With its small
footprint, low cost, and ease of operation, the Nanochrome™ is an ideal choice for your research
or pilot project.
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Nanochrome™ I R&D Load Lock
Intlvac’s Nanochrome™ I R&D Load Lock system is capable of evaporating materials
such as metals and dielectrics by Electron Beam Evaporation from a four pocket electron beam gun,
onto a direct water cooled rotating substrate stage.
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Nanochrome™ II
The Nanochrome™ II is built around a vertical split “clam shell” design that
has full access to the deposition area. The chamber stands as a vertical cylinder, nominal
31” I.D. and is 36” tall and is fabricated of 304L Stainless Steel.
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Nanochrome™ II Automatic Load Lock
Intlvac’s PVD systems are now available with an automated load locked substrate transfer option.
Ideal for runs that are short, the load lock allows the main chamber to remain at high vacuum, while substrates
are removed or loaded.
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