|
Nanochrome® II
The Nanochrome® II is built around a vertical split “clam
shell” design that has full access to the deposition area.
The chamber stands as a vertical cylinder, nominal 31” I.D.
and is 36” tall and is fabricated from 304L stainless steel.
The chamber has a large variety of feedthroughs
located on the top and bottom of the chamber, many of which are
spares.
Finish inside and out is brushed then electro
polished. The chamber has three Pyrex view ports on the chamber,
with glass cover slip in two positions. The deposition material
is shielded from the windows by using disposable float glass inserts
on the vacuum side. View port that face the electron beam gun
is fitted with a periscope assembly to allow viewing during deposition.
Click to view larger image
The top of the deposition chamber has three 1” feedthrough
ports, one custom flange that holds a 2.0” hollow
shaft ferro fluid type rotary, which has coupled onto the top,
and an optical window. The shaft inserts from the top of the chamber,
the vacuum seals are 2 static o-rings located on the shaft and
at the optical window, just below the optical window and located
on the air side of the shaft is the drive pulley, which connects
it to the drive motor located on the top of the chamber. The top
of the chamber also has two spare 1.33 and 2.75 CF flange are
supplied for future use.
> Download
PDF of Nanochrome® II Brochure.
> Download
Adobe Acrobat Reader
|