Intlvac is Your Solution for Ion Source Replacement Parts.

Large Inventory. Ship Worldwide. Order minimum $200.

1-4-20 Vented Acorn Nut
1-4-20 Vented Acorn Nut

NAV1420

EH1000 Gas Distributor Assembly
EH1000 Gas Distributor Assembly
$881.75

40105-91

EH1000 Ion Source Anode Assembly
EH1000 Ion Source Anode Assembly

40105-90

EH1000 Inner Cylinder
EH1000 Inner Cylinder

40105-25

EH1000 Anode Support
EH1000 Anode Support

40105-24

EH1000 Anode
EH1000 Anode

40105-23

EH1000 Front Plate Hollow Cathode
EH1000 Front Plate, Hollow Cathode

40105-22-HC

EH1000 Front Plate Filament
EH1000 Front Plate, Filament

40105-22

EH1000 Titanium Reflector
EH1000 Titanium Reflector

40105-21-Ti

EH1000 Tantalum Reflector
EH1000 Tantalum Reflector

40105-21-Ta

EH1000 Pyrolytic Carbon Reflector
EH1000 Pyrolytic Carbon Reflector

40105-21-C

EH1000 Stainless Steel Reflector
EH1000 Stainless Steel Reflector

40105-21

Load more products

How Can We Help Move Your Next Thin Film Coating Project Forward?

Contact Us Today