Intlvac is Your Solution for Ion Source Replacement Parts.

Large Inventory. Ship Worldwide. Order minimum $200.

EH1000/2000 Gas Connection
EH1000/2000 Gas Connection
$440.89

40105-11

EH1000 Pyrolytic Carbon Reflector
EH1000/2000 Reflector, Pyrolytic Carbon
$560.00

40105-21-C

EH1000 Anode
EH1000 Anode
$621.75

40105-23

EH1000/2000 Tantalum Reflector
EH1000/2000 Reflector, Tantalum
$679.00

40105-21-Ta

EH1000 Front Plate Filament
EH1000 Front Plate, Cathode Filament
$700.00

40105-22

EH1000/2000 Gas Distributor Assembly
EH1000/2000 Gas Distributor Assembly
$881.75

40105-91

EH1000/2000 Back Plate
EH1000/2000 Back Plate
$1,037.40

40105-01

EH1000 Outer Shell
EH1000 Outer Shell
$1,582.00

40105-02

EH1000 Ion Source Anode Assembly
EH1000 Ion Source Anode Assembly
$6,217.75

40105-90

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