Intlvac is Your Solution for Ion Source Replacement Parts.

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EH1000 Ion Source
EH1000 Ion Source

40105

EH1000/2000 Back Plate
EH1000/2000 Back Plate
$1,037.40

40105-01

EH1000 Outer Shell
EH1000 Outer Shell
$1,582.00

40105-02

EH1000 Large Threaded Socket
EH1000/2000 Large Threaded Socket
$180.88

40105-03

EH1000 Hold Down Rod
EH1000/2000 Hold Down Rod
$44.08

40105-04

EH1000 Outer Ring Standoff
EH1000/2000 Outer Ring Standoff
$73.48

40105-05

EH1000 Inner Ring Standoff
EH1000/2000 Inner Ring Standoff
$67.83

40105-06

EH1000/2000 Small Pin Connector
EH1000/2000 Small Pin Connector
$84.78

40105-07

EH1000/2000 Outer Ring
EH1000/2000 Outer Ring
$395.68

40105-08

EH1000/2000 Plug Array Body
EH1000/2000 Plug Array Body
$401.32

40105-09

EH1000/2000 Inner Ring
EH1000/2000 Inner Ring
$356.10

40105-10

EH1000/2000 Gas Connection
EH1000/2000 Gas Connection
$440.89

40105-11

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