Diamond Like Carbon


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Intlvac's DLC is a fully automated PECVD platform for DLC, Infrared Anti-reflection coating and a variety of other PECVD applications. DLC coating acts as a single-layer anti-reflective coating for high index substrates and it provides wear and chemical resistance for optical elements used in harsh environments. Bio-engineering and mechanical engineering applications benefit from the wear, diffusion and corrosion resistance provided by DLC.

The DLC system is fully automated using INTLVAC’s AUTOSYS Control System with touchscreen interface; the standard on all INTLVAC systems. This software package provides a simple, yet comprehensive graphical interface to all aspects of your system. 

The unique design and processes of the DLC allow for numerous consecutive coating runs before any maintenance is required to maximize your throughput. In addition, the DLC system comes complete with recipes for Infrared Anti-reflection coating of Silicon and Germanium optics.

For more information about creating a custom solution for your application contact sales@intlvac.com.