Long Throw Evaporator

 

Long Throw Evaporator

 

The Intlvac family of Nanochrome thin film deposition systems are designed to meet the technological and productivity requirements of multiple industries. Our Long Throw Nanochrome LTE System targets the requirements in 'lift-off' vacuum deposition. In particular, the Long Throw Nanochrome configuration optimizes the thermal evaporation of Indium and other materials such as Pb and Sb for solder bump structures. The Nanochrome LTE provides the layout, process tools, environment and deposition control to achieve the thickness, fill and material properties for a variety of successful solder bump designs.

LTE Brochure

LTE brochure

Key Benefits
  • “Lift-off” geometryuniform indium deposition  
  • Uniform coating
  • Extremely small feature sizes possible
  • In-situ plasma cleaning
  • High quality film growth
Designed for Lift Off

The LTE system is designed for "lift-off" processes providing a high level of automatically or manually controlled deposition of materials. Additional features include:control of evaporant plume
• specialized thermal evaporation technology
• in-situ plasma cleaning
• low temperature substrate stage
• high vacuum environment to achieve high quality film growth by using all dry pumping technology

System Control

A large 17” user interface running LabView allows easy access to the machine and its operating parameters. Pump down operation is fully automated by Intlvac’s “Nanocon” system controller. The Nanocon is designed to automatically pump to high vacuum with the push of a single button. LabView monitor

 

Uniform Deposition

The Nanochrome LTE is designed to thermally evaporate high volumes of solder contact metal materials such as indium. Our geometry ensures a very flat and uniform deposition front for superior "lift-off" capability. Whiskers and splatters are no longer a problem resulting in increased device yields and the ability to make smaller contacts on your wafers.uniform deposition 

For more information about creating a custom solution for your application, contact sales@intlvac.com or 1.800.959.5517