Long Throw Evaporator

 

Long Throw Evaporator


The Intlvac family of Nanochrome thin film deposition systems are designed to meet the technological and productivity requirements of multiple industries. Our Long Throw Nanochrome LTE System targets the requirements in 'lift-off' vacuum deposition. In particular, the Long Throw Nanochrome configuration optimizes the thermal evaporation of Indium and other materials such as Pb and Sb for solder bump structures. The Nanochrome LTE provides the layout, process tools, environment and deposition control to achieve the thickness, fill and material properties for a variety of successful solder bump designs.

 

uniform indium deposition

load lock

control of evaporant plume

The system is designed for "lift-off" processes providing a high level of automatically or manually controlled deposition of materials. Additional features include:

  • specialized thermal evaporation technology

  • in-situ plasma cleaning

  • low temperature substrate stage

  • high vacuum environment to achieve high quality film growth by using all dry pumping technology

uniform deposition

The Nanochrome LTE is designed to thermally evaporate high volumes of solder contact metal materials such as indium. Our geometry ensures a very flat and uniform deposition front for superior "lift-off" capability. Whiskers and splatters are no longer a problem resulting in increased device yields and the ability to make smaller contacts on your wafers.