Veeco IBE/IBD 350 Combination System

 

veeco ibe ibd combination system


•    CX 6 Cleanroom Fa├žade and Transfer Module (1)
•    Veeco IBD350 Process Module (1)
•    Veeco IBD350 Etch Rack (1)
•    Veeco IBD350 Deposition Rack (1)
•    Veeco IBE Process Module (1)
•    Veeco IBE Process Module Rack (1)
•    Veeco Main AC Power Cabinet (1)
•    Veeco Supplementary AC Power Cabinet (1)
•    CTI 9600 Cryo Compressor (2)
•    Neslab Chiller HX 150 (1)
•    BOC Edwards Dry Pump QDP80 (3)
•    POLYCOLD PFC-1100 (1

veeco ibe ibd

 

 

veeco ibe ibd

 

veeco ibe ibd control

 

 

veeco ibe ibd facade

 

veeco ibe ibd   veeco interface