Veeco RF 350S Microetch

 

veeco rf350s microetch


•    Category: Ion milling
•    Wafer Size: 6”
•    Ion Beam Etch System, 6”
•    Process: IBE & CAIBE
•    Load Station, 6”
•    Software Version for PM and TM: PM22.50.01
•    End Point Detection: Optical Emission and Scanview
•    Temperature: Julabo1600T Plus 1 Spare
•    Pump Stand: DRYVAC 50P, TRIVAC D65B
•    Turbo Pump: MAG2000
•    RF Generator: RFPP RF20M 2kW Plus 1 Spare
•    Gas Lines: Ar, N2, He
•    (1) Spare Grid
•    Marz 2000
•    400 V / 50 Hz
•    3 Phase
•    Manuals
•    Not Included: Brooks Handler

veeco rf350s

 

 

veeco rf350s

 

veeco rf350s

 

 

veeco rf350s

 

veeco rf350s

 

 

veeco rf350s