Ion Beam Etch & Ion Beam Sputter Systems

A comprehensive line of R&D tools centered around Ion Beam technology.  Process include Ion Milling (IBE), Reactive Ion Beam Etching (RIBE), Ion Beam Sputter Deposition (IBS) and more.

New Production system

The Intlvac Ion Milling batch tools are a dependable solution for low to mid-volume production.

refurbished ion beam etch deposition system

Intlvac now offers refurbished ion beam etch and ion beam deposition systems.

Systems Brochure