Ion Beam Etch & Ion Beam Sputter Systems

A comprehensive line of R&D tools centered around Ion Beam technology.  Process include Ion Milling (IBE), Reactive Ion Beam Etching (RIBE), Ion Beam Sputter Deposition (IBS) and more.

Production system

The Intlvac Ion Milling batch tools are a dependable solution for low to mid-volume production.

Systems Brochure