Nanochrome Pico

Nanochrome™ Pico

Nanochrome™ Pico

The Intlvac Nanochrome™ Pico is the ultimate all-purpose prototyping and R&D physical vapor deposition (PVD) platform on the market. It can be configured for a wide range of applications such as e-Beam evaporation for liftoff, optical interference filters, multi-layer barrier coatings, and transparent conductive oxides (TCOs).

The NC Pico with it’s 16” D-shaped chamber and small footprint can fit into any lab and the modular design allows for easy process reconfiguration (ie. sputter up to sputter down). The NC Pico is also designed to incorporate a load-lock transfer from atmosphere or between a pair of connected Pico chambers. Useful for systems dedicated to either metal films or oxides.

Process Methods

Magnetron Sputtering

magnetron sputtering 

e-Beam Evaporation

ebeam evaporation

Knudson Cell Evaporation

knudson cell evaporation

Thermal Evaporation

thermal evaporation

Ion Assisted Deposition

mark I and II ion sources

Load Lock

load lock

Applications

  • Transparent Conductive     
  • Oxides (TCO)        
  • Magnetic Materials     
  • Semiconductors
  • Optoelectronics
  • Interference Filters
  • Barrier Layers
  • MEMS
  • OLED
thin film coating       transparent conductive oxide

Specifications

HEATING: Chamber heating up to 300°C.

PUMPING: 5×10-6 Torr in under 10 minutes and better than 1×10-7 Torr ultimate pressure.

ION ASSIST: Mark I end-Hall ion source for pre-clean, ion assist, and reactive deposition.

E-BEAM: Up to 2 single-pocket or multi-pocket sources.

SUBSTRATE FIXTURING:  Standard rotary table or hub.  Optional water cooled stage or 500°C to 800°C heated stages.

SPUTTERING: Up to 3 × 3” DC, RF, AC, or Pulsed-DC magnetrons. Configurable to sputter up or sputter down and horizontally for passivation in the Ion Milling configuration.

THERMAL EVAPORATION:  Configurable with up to 6 High Voltage or Low Voltage evaporation sources.

EXPANSION: Costumizable for load-lock, glovebox, or retrofit onto cluster tool.

For more information about creating a custom solution for your application contact sales@intlvac.com

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