Thermal Management

Intlvac, the leading Canadian supplier of high vacuum parts and accessories, provides the following thermal management products to its valued clients.

For more information on any of these products, please contact Intlvac directly.

Dry Chuck Vacuum Pads

Silver powder is incorporated into a silicon elastomer matrix. The pads allow wafers and other flat substrates to be thermally anchored for heating or cooling without grease!

Contact Intlvac with your requirements for price and availability.

Data Sheet for Dry Chuck Vacuum Pads [PDF: 176 Kb]