Nanoquest I

A versatile ion beam platform for R&D, designed to etch single wafers up to 5″. Equipped with high-flow cooling, it can etch through photoresist or other masks to create patterned substrates on virtually any material.

Nanoquest II

Delivers precise, repeatable dry etching of virtually any material—supporting universities and research institutions worldwide in advancing MEMS, optical, sensing, photonic, RF/microwave, passive power, biocompatible, and memory device research.

Nanoquest III/IV

The system allows precise control of ion beam energy, and etch angle automatically. Designed as a production etch tool, the Nanoquest III/IV is capable of performing processes ranging from simple inert etch to complex reactive operation.

Nanoquest PICO

Designed to etch small wafers and dies and is ideal for fast etching of thin films that do not respond well to conventional chemical or dry etching processes. Perfect for lab spaces where a small footprint is essential.