Specifications
The chamber’s interior and exterior are mechanically finished and electropolished, minimizing surface area to reduce pump-down times and water vapor backgrounds. It is equipped with three Pyrex viewports, two of which feature protective glass cover slips. The deposition material is shielded from these viewports, and the one facing the electron beam gun includes a periscope and polarizing attenuator assemblies for real-time viewing during deposition.
A variety of feedthrough ports are positioned on the top of the chamber, including a 2.0-inch hollow shaft ferrofluid rotary feedthrough with an integrated optical window. Additional spare ports on the side and bottom offer flexibility for future applications.
Designed to deliver exceptional performance, the system is ideal for advanced techniques such as long-throw reactive sputtering, electron beam evaporation, and thermal evaporation, enabling the production of high-quality thin films with precision and reliability.