Mark+  Series Ion Source Controllers

Compact Power and Control for End-Hall Ion Sources
The Intlvac Mark+ Series Ion Source Controllers feature advanced switching power technology engineered to deliver stable, efficient, and reliable power to End Hall ion sources. Designed for demanding process environments, the Mark+ Series combines precise control, operator-friendly functionality, and integrated gas flow management in a compact rack-mount platform.

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Mark I+ Ion Source

Mark+  Series Ion Source Controllers

Compact Power and Control for End-Hall Ion Sources 
The Intlvac Mark+ Series Ion Source Controllers feature advanced switching power technology engineered to deliver stable, efficient, and reliable power to End Hall ion sources. Designed for demanding process environments, the Mark+ Series combines precise control, operator-friendly functionality, and integrated gas flow management in a compact rack-mount platform.
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Key Features


  • High-efficiency switch mode power supplies
  • Simple single-button operation
  • Intuitive touchscreen interface
  • Advanced control system for improved plasma stability
  • Integrated multi-channel gas flow control
  • Event and status logging for improved diagnostics
  • Troubleshooting tools to reduce downtime

Technical Specifications


Parameter
Specification
Voltage Range
0–300 VDC

0–200 VDC, Mark III+
Current Range
0–1 ADC, Mark I+

0–5 ADC, Mark II+

0–10 ADC, Mark II+ HO

0–15 ADC, Mark III+

Adjustable current target

Adjustable voltage target

Over-voltage protection

Thermal protection

Automatic current regulation
Parameter
Requirement
Voltage
50 VRMS
Current Range
Vac / 0–25 ARMS

Adjustable current target

Adjustable current limit

Thermal protection
Parameter
Value
Emission
60 VDC, 0–12.5 A, Mark II+ HO
Keeper
60 VDC, 0–17.5 A, Mark III+

50 VDC, 500–1500 mA

Adjustable current target

Adjustable current limit

Thermal protection
Parameter
Value
Remote
RS232 Interface

7 Digital in, 8 Digital out

Analog I/O

MFC port to control up to 4 MFCs and PSO valves
Parameter
Value
Cooling
Forced air
Dimensions (H × W × D)
7” × 19.25” × 21.75”

Additional 4.25” required for connector clearance
Dimensions
68 mm × 70 mm
Mounting
19” rack mountable
Weight
45 lbs
Input Power
200–230 VAC, 50/60 Hz, single phase

16 A max on Mark I+

20 A max on Mark II+

24 A max on Mark II+ HO or III+

Mark+ Series Power Supplies are available

Mark I+ controller

Ideal for use with Intlvac Mark I+ Ion Sources, with capacity up to 300 W of discharge power.

Mark II+ controller

Ideal for use with Intlvac Mark II+ and Mark II+ Water-Cooled Ion Sources, with capacity up to 1500 W of discharge power.

Mark II+ HO controller
Mark III controller

Designed for Intlvac hollow cathode applications, providing enhanced performance for higher power process requirements with capacity up to 3000 W of discharge power.

Why Choose Intlvac Thin Film?

Intlvac Thin Film power and control platforms are engineered for precision, reliability, and long-term serviceability. 

The Mark+ Series Ion Source Controllers integrate seamlessly into compact research tools, pilot-scale systems, and production thin film platforms, providing stable power delivery, intuitive operation, and consistent process control across a range of End-Hall ion source applications.

We combine advanced plasma engineering with practical system design to deliver reproducible, high-quality thin films.

Why Choose Intlvac Thin Film?

Intlvac Thin Film power and control platforms are engineered for precision, reliability, and long-term serviceability. 

The Mark+ Series Ion Source Controllers integrate seamlessly into compact research tools, pilot-scale systems, and production thin film platforms, providing stable power delivery, intuitive operation, and consistent process control across a range of End-Hall ion source applications.

We combine advanced plasma engineering with practical system design to deliver reproducible, high-quality thin films.


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