Intlvac Systems

Nanoquest I

A versatile ion beam platform for R&D, designed to etch single wafers up to 5″. Equipped with high-flow cooling, it can etch through photoresist or other masks to create patterned substrates on virtually any material.

Nanoquest II

Delivers precise, repeatable dry etching of virtually any material—supporting universities and research institutions worldwide in advancing MEMS, optical, sensing, photonic, RF/microwave, passive power, biocompatible, and memory device research.

Nanoquest III/IV

The system allows precise control of ion beam energy, and etch angle automatically. Designed as a production etch tool, the Nanoquest III/IV is capable of performing processes ranging from simple inert etch to complex reactive operation.

Nanoquest PICO

Designed to etch small wafers and dies and is ideal for fast etching of thin films that do not respond well to conventional chemical or dry etching processes. Perfect for lab spaces where a small footprint is essential.

Nanochrome IV IBSD

Nanoquest I IBSD Combo

The Nanoquest I IBSD Combo deposits and etches substrates up to 100 mm. It sputters metals and dielectrics at low pressure without powered cathodes and features a multi-target carousel, water-cooled rotating tilt stage, and integrated ion beam etching.

Aether Vacuum Degassing

 Designed for rapid, consecutive degassing of small components for space-ready use by holding them under high vacuum while being baked by thermal radiation.

Ares TVAC

Featuring a horizontal chamber with dual access doors, multiple instrumentation ports, and automated control via Intlvac’s Autosys PLC, it provides reliable black body radiation heating and comprehensive data logging for space simulation testing.

Deimos TVAC

Control via Intlvac’s Autosys PLC, it provides oil-free high vacuum, black body temperature simulation from 150 K, and operational testing across a -120 °C to +120 °C range with full data logging and LabView interface.

Phobos TVAC

Our midsize thermal vacuum system, designed for testing a wide range of components in clean, dry-pumped high vacuum (<10⁻⁶ torr), it provides automated environmental control via Intlvac’s Autosys PLC with full data logging and LabView interface.