Providing Technology Solutions since 1996
At Intlvac, we specialize in Etch, Evaporation, Sputter, and PECVD process technologies, forming the cornerstone of our expertise.
With decades of expertise in thin film coating and etching tools, Intlvac has perfected systems for advanced processes like E-Beam and Thermal Evaporation, DC Magnetron Sputtering, and Plasma-Assisted Reactive Sputtering. Using these techniques, we deliver high-quality coating services across a wide range of materials and complex geometries.
Find every component for the Mark I and Mark II Ion Sources in our online store. With parts in stock and next-day shipping.
Intlvac is the exclusive Canadian distributor for Leybold vacuum products and certified service.
The Nanoquest I IBSD Combo deposits and etches on 100mm diameter substrates and smaller. It is a compact tool which brings premium PVD deposition to thin film fabrication and full ion beam etch capability. The technology sputters at low pressure metals & dielectrics without powered cathodes. It is equipped with a multi-target carousel; water-cooled, rotating and angle-tilt substrate stage and ion beam etch capability. While producing the reputable high quality IBSD coatings, the same tool can planarize films and etch patterned wafers.