Nanoquest I IBSD Combo

The Nanoquest I IBSD Combo deposits and etches on 100mm diameter substrates and smaller. It is a compact tool which brings premium PVD deposition to thin film fabrication and full ion beam etch capability. The technology sputters at low pressure metals & dielectrics without powered cathodes. It is equipped with a multi-target carousel; water-cooled, rotating and angle-tilt substrate stage and ion beam etch capability. While producing the reputable high quality IBSD coatings, the same tool can planarize films and etch patterned wafers.

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