Your Solution for Ion Sources & Replacement Parts

Large Inventory • Ships Worldwide • $200 Minimum Order

Intlvac supplies high-quality ion sources and replacement parts designed for reliability, easy maintenance, and long service life. Our products are trusted by companies worldwide for ion-assisted thin film deposition and substrate cleaning applications. We maintain a full inventory of Mark I and Mark II ion source components ready to ship and provide complete refurbishment services using parts made to original specifications. Most orders ship the same day, and our team is always available to help you find the right solution.


Ion Source & Parts

Mark I+

Mark I+

Intlvac is your trusted source for ion sources and replacement parts, delivering high-quality, reliable equipment designed for ease of maintenance and long-term performance.

Mark II+

Mark II+

Intlvac is your trusted source for ion sources and replacement parts, delivering high-quality, reliable equipment designed for ease of maintenance and long-term performance.

Mark II

Mark II

Intlvac is your trusted source for ion sources and replacement parts, delivering high-quality, reliable equipment designed for ease of maintenance and long-term performance.

Mark I

Mark I

Intlvac is your trusted source for ion sources and replacement parts, delivering high-quality, reliable equipment designed for ease of maintenance and long-term performance.

EH1000-WC

EH1000-WC

Intlvac is your trusted source for ion sources and replacement parts, delivering high-quality, reliable equipment designed for ease of maintenance and long-term performance.

HCES 5000

HCES 5000

Intlvac is your trusted source for ion sources and replacement parts, delivering high-quality, reliable equipment designed for ease of maintenance and long-term performance.