Intlvac is Your Solution for Ion Source Replacement Parts.

Large Inventory. Ship Worldwide. Order minimum $200.

Gas Line, 1/4" X 24", Stainless Steel, Flex
$510.00

40100-04

Gas Line, 1/8" X 30", Stainless Steel
$85.00

40100-03

Mark I+ PM Kit
Mark I+ PM Kit
$945.00

40103-SK-B

1" Bulkhead Feedthrough Enclosure
1" Bulkhead Feedthrough Enclosure

40323

Insulator #10 Male, White
Insulator #10 Male, White
$15.00

10-32M-L

HCES 5000 Mount Bracket
HCES 5000 Mount Bracket
$125.00

40201-01

Hex Screw, #6-32 x 1/2", SS
Hex Screw, #6-32 x 1/2", SS
$0.35

SH063208

Hex Nut #6-32, Stainless Steel
Hex Nut #6-32, Stainless Steel
$0.40

N0632

Washer #6-32, Wide
Washer #6-32, Wide
$0.45

W06-A

Spring Lock Washer, 1/4", Stainless Steel (Pkg10)
Spring Lock Washer, 1/4", Stainless Steel (Pkg10)
$5.72

WSL14

Flat Head, #6-32 x 1/4", Stainless Steel (Pkg10)
Flat Head, #6-32 x 1/4", Stainless Steel (Pkg10)
$1.20

SF063204

SHCS 1/4"-20 x 1", Stainless Steel (Pkg10)
SHCS 1/4"-20 x 1", Stainless Steel (Pkg10)
$7.98

S142016

Hex Nut, 1/4"-20, Stainless Steel (Pkg10)
Hex Nut 1/4"-20, Stainless Steel (Pkg10)
$3.46

N1420

Sputter Cup, #10-32 (Pkg10)
Sputter Cup, #10-32
$10.50

ISC1032

Insulator, #10-32, Short, Male
Insulator, #10-32, Short, Male
$4.52

I10M-A

Fluid Union, 1/8" Stainless Steel
Fluid Union, 1/8" Stainless Steel
$30.00

FU02

SHCS 1/4"-20 x 2.15", Gold Plated
SHCS 1/4"-20 x 2.15", Gold Plated
$31.92

S142035Au

Flat Head Screw, #6-32 x 1-1/4", Stainless Steel
Flat Head Screw, #6-32 x 1-1/4", Stainless Steel
$15.00

SF063220

Flat Head, #4-40 x 1/2", Stainless Steel
Flat Head Screw, #4-40 x 1/2", Stainless Steel (Pkg10)
$5.19

SF044008

Nut, Hex, #6-32, Gold Plated
Hex Nut #6-32, Gold Plated (Pkg10)
$171.20

N0632Au

EH1000 Front Plate, Cathode Filament, Water Cooled
EH1000 Front Plate, Cathode Filament, Water Cooled
$1,415.00

40105-22-WC

Mark I Gas Distributor, Titanium
Mark I Gas Distributor, Titanium *66994
$94.00

40101-05-Ti-A

Baseplate Feedthrough 1", 2.75 CF
Baseplate Feedthrough 1", 2.75 CF
$26.00

40309

Mark II Gas Distributor, Standard Graphite
Mark II Gas Distributor, Standard Graphite
$110.00

40102-05-C1

Mark I Anode, Standard Graphite
Mark I Anode, Standard Graphite
$71.00

40101-01-C1

Intlvac 5A Filament Power Supply
Intlvac 5A Filament Power Supply
$14,400.00

40606

Intlvac End Hall 10A Power Supply
Intlvac End Hall 10A Power Supply
$21,000.00

40605

Feedthrough 1", Dual Water, Swagelok
Feedthrough 1", Dual Water, Swagelok
$585.00

40321-1

Gas Feedthrough 1", 1/8" Single Gas - 1/4" Compression
Gas Feedthrough 1", 1/8" Single Gas - 1/4" Compression
$350.00

40322

Feedthrough 1", Dual Water, VCR/VCO
Feedthrough 1/4" Swagelok to 1/4" VCO
$585.00

40321

Mark II+ Gas Distributor Rebuild Kit
Mark II+ Gas Distributor Rebuild Kit
$105.00

40104-SK-3

FDTH, OR, 1.00, DC Power, 4Pin, V2
FDTH, OR, 1.00, DC Power, 4Pin, V2
$2,445.00

426830

CABLE ASSY, MK I+ / II+ TO V2 FDTH, 20'
CABLE ASSY, MK I+ / II+ TO V2 FDTH, 20'
$1,150.00

427354-1

Socket Head Cap Screw #10-32 x 3/8", Gold Plated
Socket Head Cap Screw #10-32 x 3/8", Gold Plated

S103206Au

Mark I+ Spare Parts Kit
Mark I+ Spare Parts Kit
$163.00

40103-SK

Intlvac 33 - Case of 12
Intlvac 33 - Case of 12
$480.00

INT33-1

Intlvac 70 Ultra - Case of 12
Intlvac 70 Ultra - Case of 12
$480.00

INT70-1

Intlvac 20 Ultra
Intlvac 20 Ultra
$303.00

INT20

Intlvac 100 Pump Fluid - Case of 4
Intlvac 100 Pump Fluid - Case of 4
$380.63

INT100-1

Intlvac 100 Pump Fluid
Intlvac 100 Pump Fluid
$390.00

INT100

Intlvac 210 di-ester Pump Fluid - Case of 4
Intlvac 210 Diester Pump Fluid - Case of 4
$725.00

INT210-1

Intlvac 210 Diester Pump Fluid
Intlvac 210 Diester Pump Fluid
$721.88

INT210

Intlvac 130 Pump Fluid
Intlvac 130 Pump Fluid
$390.00

INT130

Mark II+ Ion Source, Water Cooled
Mark II+ Ion Source, Water Cooled
$15,000.00

40104-WC

Vented Acorn Nut 1-4"-20
Vented Acorn Nut, 1/4"-20

NAV1420

EH1000/2000 Gas Distributor Assembly
EH1000/2000 Gas Distributor Assembly
$881.75

40105-91

EH1000 Ion Source Anode Assembly
EH1000 Ion Source Anode Assembly
$6,217.75

40105-90

EH1000 Inner Cylinder
EH1000 Inner Cylinder
$423.95

40105-25

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