Your Solution for Ion Sources & Replacement Parts

Large Inventory • Ships Worldwide • $200 Minimum Order

Intlvac supplies high-quality ion sources and replacement parts designed for reliability, easy maintenance, and long service life. Our products are trusted by companies worldwide for ion-assisted thin film deposition and substrate cleaning applications. We maintain a full inventory of Mark I and Mark II ion source components ready to ship and provide complete refurbishment services using parts made to original specifications. Most orders ship the same day, and our team is always available to help you find the right solution.


Ion Source & Parts

Mark I+

Mark I+

The Intlvac Thin Film Mark I⁺ Ion Source is a compact, radiatively cooled, gridless end-Hall ion source designed to deliver stable, high-current ion beams for demanding vacuum thin film applications.

Mark II+

Mark II+

The Mark II⁺ Radiantly Cooled Ion Source is a gridless end-Hall ion source designed for industrial vacuum processing applications requiring high current density and low ion beam energies.

Mark II

Mark II

The Intlvac Mark II End-Hall Ion Source is the industry-standard ion assist source for optical coating systems and remains one of the most widely used ion sources in production environments.

Mark I

Mark I

The Intlvac Mark I End-Hall Ion Source is designed for small research, development, and pilot production e-beam coating systems.

EH1000-WC

EH1000-WC

The Intlvac eH1000 End-Hall Ion Source is engineered to deliver efficient, high-current ion beams for medium-sized vacuum systems.

HCES 5000

HCES 5000

The Intlvac HCES 5000 Hollow Cathode Electron Source delivers stable, regulated electron emission for ionization support and beam neutralization in end-Hall and gridless ion source systems.